AAAAAA
Results: 26-50/77
Authors:
CERRINA F
Citation: F. Cerrina, X-RAY PHOTO-ELECTRON SPECTROMICROSCOPY, Journal of electron spectroscopy and related phenomena, 76, 1995, pp. 9-19
Authors:
GOZZO F
BERGER H
COLLINS IR
MARGARITONDO G
NG W
RAYCHAUDHURI AK
LIANG S
SINGH S
CERRINA F
Citation: F. Gozzo et al., MICROSCOPIC-SCALE LATERAL INHOMOGENEITIES OF THE GASE-GE HETEROJUNCTION ENERGY LINEUP, Physical review. B, Condensed matter, 51(8), 1995, pp. 5024-5027
Authors:
TAN ZQ
MACDOWELL AA
LAFONTAINE B
BJORKHOLM JE
TENNANT D
TAYLOR D
HIMEL M
FREEMAN RR
WASKIEWICZ WK
WINDT DL
SPECTOR S
RAYCHAUDHURI AK
STULEN RH
NG W
CERRINA F
Citation: Zq. Tan et al., AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS, Review of scientific instruments, 66(2), 1995, pp. 2241-2243
Authors:
WELNAK J
DONG Z
SOLAK H
WALLACE J
CERRINA F
BERTOLO M
BIANCO A
DIFONZO S
FONTANA S
JARK W
MAZZOLINI F
ROSEI R
SAVOIA A
UNDERWOOD JH
MARGARITONDO G
Citation: J. Welnak et al., SUPERMAXIMUM - A SCHWARZSCHILD-BASED, SPECTROMICROSCOPE FOR ELETTRA, Review of scientific instruments, 66(2), 1995, pp. 2273-2276
Authors:
LAI B
YUN W
XIAO Y
YANG L
LEGNINI D
CAI Z
KRASNOPEROVA A
CERRINA F
DIFABRIZIO E
GRELLA L
GENTILI M
Citation: B. Lai et al., DEVELOPMENT OF A HARD X-RAY-IMAGING MICROSCOPE, Review of scientific instruments, 66(2), 1995, pp. 2287-2289
Authors:
WELLS GM
ANDERSON PD
LEONARD QJ
CERRINA F
WALDO WG
YAMAZAKI K
Citation: Gm. Wells et al., EVALUATION OF A SOLID-STATE DETECTOR FOR X-RAY-LITHOGRAPHY DOSIMETRY, JPN J A P 1, 33(12B), 1994, pp. 6905-6907
Authors:
KRASNOPEROVA AA
BELL T
RHYNER S
TAYLOR JW
DEPABLO J
CERRINA F
Citation: Aa. Krasnoperova et al., DISSOLUTION STUDY OF A NOVOLAK-BASED PHOTORESIST BASED ON A DEVELOPERDIFFUSION-MODEL, JPN J A P 1, 33(12B), 1994, pp. 7012-7016
Authors:
KRASNOPEROVA AA
KHAN M
RHYNER S
TAYLOR JW
ZHU Y
CERRINA F
Citation: Aa. Krasnoperova et al., MODELING AND SIMULATIONS OF A POSITIVE CHEMICALLY AMPLIFIED PHOTORESIST FOR X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3900-3904
Authors:
KHAN M
MOHAMMAD L
XIAO J
OCOLA L
CERRINA F
Citation: M. Khan et al., UPDATED SYSTEM MODEL FOR X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3930-3935
Authors:
GENTILI M
DIFABRIZIO E
GRELLA L
BACIOCCHI M
MASTROGIACOMO L
MAGGIORA R
XIAO J
CERRINA F
Citation: M. Gentili et al., FABRICATION OF CONTROLLED SLOPE ATTENUATED PHASE-SHIFT X-RAY MASKS FOR 250 NM SYNCHROTRON LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3954-3958
Authors:
CHEN HTH
ENGELSTAD RL
CERRINA F
Citation: Hth. Chen et al., NOVEL TECHNIQUE FOR THE SEPARATION OF MECHANICAL-PROPERTIES AND INTRINSIC STRESS OF PRE-IRRADIATED AND POST-IRRADIATED MEMBRANES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3975-3978
Authors:
DIFABRIZIO E
GENTILI M
GRELLA L
BACIOCCHI M
KRASNOPEROVA A
CERRINA F
YUN W
LAI B
GLUSKIN E
Citation: E. Difabrizio et al., HIGH-PERFORMANCE MULTILEVEL BLAZED X-RAY MICROSCOPY FRESNEL ZONE PLATES - FABRICATED USING X-RAY-LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3979-3985
Authors:
OCOLA LE
CERRINA F
Citation: Le. Ocola et F. Cerrina, PARAMETRIC MODELING AT RESIST-SUBSTRATE INTERFACES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3986-3989
Authors:
SHOKI T
OHKUBO R
KOSUGA H
YAMAGUCHI Y
ANNAKA N
WELLS GM
YAMAZAKI K
CERRINA F
Citation: T. Shoki et al., ACCELERATED RADIATION-DAMAGE STUDIES OF ANTIREFLECTION MATERIALS ON SIC X-RAY MASK MEMBRANE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3995-4000
Authors:
CHEN G
YAMAZAKI K
WALDO W
WELNAK J
WELLS GM
CERRINA F
Citation: G. Chen et al., SYNCHROTRON-RADIATION X-RAY-LITHOGRAPHY BEAMLINE OPTICS ALIGNMENT USING THE HARTMANN METHOD, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4013-4017
Authors:
XIAO JB
CERRINA F
RIPPSTEIN RP
Citation: Jb. Xiao et al., NOVEL SINGLE MIRROR CONDENSER FOR X-RAY-LITHOGRAPHY BEAM LINES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4018-4023
Authors:
XIAO JB
KHAN M
NACHMAN R
WALLACE J
CHEN Z
CERRINA F
Citation: Jb. Xiao et al., MODELING IMAGE-FORMATION - APPLICATION TO MASK OPTIMIZATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4038-4043
Authors:
PAN SW
REILLY MT
DIFABRIZIO E
LEONARD Q
TAYLOR JW
CERRINA F
Citation: Sw. Pan et al., AN OPTIMIZATION DESIGN METHOD FOR CHEMICALLY AMPLIFIED RESIST PROCESS-CONTROL, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 325-332
Authors:
XIAO JB
CERRINA F
Citation: Jb. Xiao et F. Cerrina, DESIGN OF ASPHERIC MIRROR FOR SYNCHROTRON-RADIATION X-RAY-LITHOGRAPHYBEAMLINE, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 231-237
Authors:
CHEN GJ
GUO JZY
CERRINA F
Citation: Gj. Chen et al., APPLICATIONS OF FACETED MIRRORS TO X-RAY-LITHOGRAPHY BEAMLINES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 238-243
Authors:
DELRIO MS
FERRERO C
CHEN GJ
CERRINA F
Citation: Ms. Delrio et al., MODELING PERFECT CRYSTALS IN TRANSMISSION GEOMETRY FOR SYNCHROTRON-RADIATION MONOCHROMATOR DESIGN, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 338-343
Authors:
WELNAK C
CHEN GJ
CERRINA F
Citation: C. Welnak et al., SHADOW - A SYNCHROTRON-RADIATION AND X-RAY OPTICS SIMULATION TOOL, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 344-347
Authors:
RAYCHAUDHURI AK
NG W
LIANG S
CERRINA F
Citation: Ak. Raychaudhuri et al., SOFT-X-RAY FOUCAULT TEST - A PATH TO DIFFRACTION-LIMITED IMAGING, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 364-371
Authors:
WELNAK J
RAYCHAUDHURI AK
NG W
CERRINA F
Citation: J. Welnak et al., DOUBLE-MOMENT KIRKPATRICK-BAEZ CONDENSING MIRRORS - IN-SITU ALIGNMENT, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 372-375
Authors:
CHEN GJ
CERRINA F
VOSS KF
KIM KH
BROWN FC
Citation: Gj. Chen et al., RAY-TRACING OF X-RAY FOCUSING CAPILLARIES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 407-411