Citation: Yh. Im et al., Level set approach to simulation of feature profile evolution in a high-density plasma-etching system, J VAC SCI B, 19(3), 2001, pp. 701-710
Authors:
Pearton, SJ
Ren, F
Zhang, AP
Dang, G
Cao, XA
Lee, KP
Cho, H
Gila, BP
Johnson, JW
Monier, C
Abernathy, CR
Han, J
Baca, AG
Chyi, JI
Lee, CM
Nee, TE
Chuo, CC
Chu, SNG
Citation: Sj. Pearton et al., GaN electronics for high power, high temperature applications, MAT SCI E B, 82(1-3), 2001, pp. 227-231
Authors:
Polyakov, AY
Smirnov, NB
Govorkov, AV
Zhang, AP
Ren, F
Pearton, SJ
Chyi, JI
Nee, TE
Chou, CC
Lee, CM
Citation: Ay. Polyakov et al., Electrical properties and spectra of deep centers in GaN p-i-n rectifier structures, J ELEC MAT, 30(3), 2001, pp. 147-155
Authors:
Luo, B
Ren, F
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Pearton, SJ
Wu, CS
Kopf, RF
Johnson, D
Sasserah, JN
Citation: B. Luo et al., Comparison of the effects of H-2 and D-2 plasma exposure on AlGaAs/GaAs high electron mobility transistors, SOL ST ELEC, 45(9), 2001, pp. 1613-1624
Authors:
Hobson, WS
Lopata, J
Chirovsky, LMF
Chu, SNG
Dang, G
Lou, B
Ren, F
Tayahi, M
Kilper, DC
Pearton, SJ
Citation: Ws. Hobson et al., Small and large signal performance and gain-switching of intra-cavity contacted, shallow implant apertured VCSELs, SOL ST ELEC, 45(9), 2001, pp. 1639-1644
Authors:
Lee, JW
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Devre, M
Mackenzie, KD
Johnson, D
Sasserath, JN
Pearton, SJ
Ren, F
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Citation: Jw. Lee et al., Understanding of etch mechanism and etch depth distribution in inductivelycoupled plasma etching of GaAs, SOL ST ELEC, 45(9), 2001, pp. 1683-1686