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Results:
1-19
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Results: 19
Authors:
DAVIDSON MR
BERRY GJ
CAIRNS JA
FITZGERALD AG
LAWRENSON B
THOMSON J
TURCU ICE
SHAIKH W
SPENCER N
ALLOTT RM
TAKEYASU N
Citation: Mr. Davidson et al., NOVEL ROUTE FOR THE PRODUCTION OF X-RAY MASKS FROM A RANGE OF ORGANOMETALLIC FILMS, Microelectronic engineering, 42, 1998, pp. 279-282
Authors:
BERRY GJ
CAIRNS JA
DAVIDSON MR
RODLEY DRG
THOMSON J
TURCU ICE
SHAIKH W
Citation: Gj. Berry et al., 1 NM X-RAY-LITHOGRAPHY USING NOVEL MASK FABRICATION TECHNIQUE, Review of scientific instruments, 69(9), 1998, pp. 3350-3352
Authors:
BALLERINI M
MILANI M
COSTATO M
SQUADRINI F
TURCU ICE
Citation: M. Ballerini et al., LIFE-SCIENCE APPLICATIONS OF FOCUSED ION-BEAMS (FIB), European journal of histochemistry, 41, 1997, pp. 89-90
Authors:
TURCU ICE
ALLOT RM
MANN CM
REEVES C
ROSS IN
LISI N
MADDISON BJ
MOON SW
PREWETT P
STEVENSON JTM
ROSS AWS
GUNDLACH AM
KOEK B
MITCHELL P
ANASTASI P
MCCOARD C
KIM NS
Citation: Ice. Turcu et al., X-RAY MICROFABRICATION AND NANOFABRICATION USING A LASER-PLASMA SOURCE AT 1 NM WAVELENGTH, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2495-2502
Authors:
TURCU ICE
MANN CM
MOON SW
ALLOTT R
LISI N
MADDISON BJ
HUQ SE
KIM NS
Citation: Ice. Turcu et al., DEEP, 3-DIMENSIONAL LITHOGRAPHY WITH A LASER-PLASMA X-RAY SOURCE AT 1-NM WAVELENGTH, Microelectronic engineering, 35(1-4), 1997, pp. 541-544
Authors:
TURCU ICE
GOWER MC
HUNTINGTON P
Citation: Ice. Turcu et al., MEASUREMENT OF KRF LASER BREAKDOWN THRESHOLD IN GASES, Optics communications, 134(1-6), 1997, pp. 66-68
Authors:
MEIGHAN O
GRAY A
MOSNIER JP
WHITTY W
COSTELLO JT
LEWIS CLS
MACPHEE A
ALLOTT R
TURCU ICE
LAMB A
Citation: O. Meighan et al., SHORT-PULSE, EXTREME-ULTRAVIOLET CONTINUUM EMISSION FROM A TABLE-TOP LASER-PLASMA LIGHT-SOURCE, Applied physics letters, 70(12), 1997, pp. 1497-1499
Authors:
BRUNTON AN
FRASER GW
LEES JE
TURCU ICE
Citation: An. Brunton et al., METROLOGY AND MODELING OF MICROCHANNEL PLATE X-RAY OPTICS, Applied optics, 36(22), 1997, pp. 5461-5470
FABRICATION OF 200NM FIELD-EFFECT TRANSISTORS BY X-RAY-LITHOGRAPHY USING A LASER-PLASMA X-RAY SOURCE
Authors:
REEVES CM
TURCU ICE
STEVENSON JTM
ROSS AWS
GUNDLACH AM
PREWETT P
LAWES RA
ANASTASI P
BURGE R
MICHELL P
Citation: Cm. Reeves et al., FABRICATION OF 200NM FIELD-EFFECT TRANSISTORS BY X-RAY-LITHOGRAPHY USING A LASER-PLASMA X-RAY SOURCE, Microelectronic engineering, 30(1-4), 1996, pp. 187-190
Authors:
TURCU ICE
ROSS IN
Citation: Ice. Turcu et In. Ross, 1 W PLASMA X-RAY SOURCE FOR LITHOGRAPHY AT 1 NM WAVELENGTH, Review of scientific instruments, 67(9), 1996, pp. 3245-3247
Authors:
MOON SW
MANN CM
MADDISON BJ
TURCU ICE
ALLOT R
HUQ SE
LISI N
Citation: Sw. Moon et al., TERAHERTZ WAVE-GUIDE COMPONENTS FABRICATED USING A 3D X-RAY MICROFABRICATION TECHNIQUE, Electronics Letters, 32(19), 1996, pp. 1794-1795
Authors:
TURCU ICE
REEVES CM
STEVENSON JTM
ROSS AWS
GUNDLACH AM
PREWETT P
ANASTASI P
KOEK B
MITCHELL P
LAKE P
Citation: Ice. Turcu et al., 180NM X-RAY-LITHOGRAPHY WITH A HIGH-REPETITION-RATE LASER-PLASMA SOURCE, Microelectronic engineering, 27(1-4), 1995, pp. 295-298
Authors:
REEVES CM
TURCU ICE
PREWETT PD
GUNDLACH AM
STEVENSON JT
WALTON AJ
ROSS AWS
LAWES RA
ANASTASI P
BURGE R
MITCHELL P
Citation: Cm. Reeves et al., FABRICATION OF 200 NM FIELD-EFFECT TRANSISTOR BY X-RAY-LITHOGRAPHY WITH A LASER-PLASMA X-RAY SOURCE, Electronics Letters, 31(25), 1995, pp. 2218-2219
Authors:
TURCU ICE
MALDONADO JR
ROSS IN
SHIELD H
TRENDA P
BATANI D
FLUCK P
GOODSON H
Citation: Ice. Turcu et al., CALIBRATION OF AN EXCIMER LASER-PLASMA SOURCE FOR X-RAY-LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 207-210
Authors:
MATOUSEK P
HESTER RE
MOORE JN
PARKER AW
PHILLIPS D
TONER WT
TOWRIE M
TURCU ICE
UMAPATHY S
Citation: P. Matousek et al., HIGH-REPETITION-RATE PICOSECOND TIME-RESOLVED RESONANCE RAMAN-SPECTROSCOPY APPARATUS, Measurement science & technology, 4(10), 1993, pp. 1090-1095
Authors:
TURCU ICE
ROSS IN
HENING A
STEYER M
SOOM B
WATSON JG
HERMAN P
Citation: Ice. Turcu et al., X-RAY-LITHOGRAPHY WITH EFFICIENT PICOSECOND KRF LASER-PLASMA SOURCE AT 1NM WAVELENGTH, Microelectronic engineering, 21(1-4), 1993, pp. 95-98
Authors:
MICHETTE AG
TURCU ICE
SCHULZ MS
BROWNE MT
MORRISON GR
FLUCK P
BUCKLEY CJ
FOSTER GF
Citation: Ag. Michette et al., SCANNING-X-RAY MICROSCOPY USING A LASER-PLASMA SOURCE, Review of scientific instruments, 64(6), 1993, pp. 1478-1482
Authors:
TURCU ICE
ROSS IN
SCHULZ MS
DAIDO H
TALLENTS GJ
KRISHNAN J
DWIVEDI L
HENING A
Citation: Ice. Turcu et al., SPATIAL COHERENCE MEASUREMENTS AND X-RAY HOLOGRAPHIC IMAGING USING A LASER-GENERATED PLASMA X-RAY SOURCE IN THE WATER WINDOW SPECTRAL REGION, Journal of applied physics, 73(12), 1993, pp. 8081-8087
Authors:
TURCU ICE
ROSS IN
TALLENTS GJ
Citation: Ice. Turcu et al., EFFICIENT KEV X-RAY-EMISSION FROM PLASMAS GENERATED WITH 4 PS KRF EXCIMER-LASER PULSES, Applied physics letters, 63(22), 1993, pp. 3046-3048
Risultati:
1-19
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