Authors:
KACHURIN GA
TYSCHENKO IE
REBOHLE L
SKORUPA W
YANKOV RA
FROEB H
BOEHME T
LEO K
Citation: Ga. Kachurin et al., SHORT-WAVELENGTH PHOTOLUMINESCENCE OF SIO2 LAYERS IMPLANTED WITH HIGH-DOSES OF SI+, GE+, AND AR+ IONS, Semiconductors, 32(4), 1998, pp. 392-396
Authors:
REBOHLE L
VONBORANY J
GROTZSCHEL R
MARKWITZ A
SCHMIDT B
TYSCHENKO IE
SKORUPA W
FROB H
LEO K
Citation: L. Rebohle et al., STRONG BLUE AND VIOLET PHOTOLUMINESCENCE AND ELECTROLUMINESCENCE FROMGE-IMPLANTED AND SI-IMPLANTED SILICON DIOXIDE, Physica status solidi. a, Applied research, 165(1), 1998, pp. 31-35
Authors:
TYSCHENKO IE
REBOHLE L
YANKOV RA
SKORUPA W
MISIUK A
Citation: Ie. Tyschenko et al., ENHANCEMENT OF THE INTENSITY OF THE SHORT-WAVELENGTH VISIBLE PHOTOLUMINESCENCE FROM SILICON-IMPLANTED SILICON-DIOXIDE FILMS CAUSED BY HYDROSTATIC-PRESSURE DURING ANNEALING, Applied physics letters, 73(10), 1998, pp. 1418-1420
Authors:
KACHURIN GA
TYSCHENKO IE
ZHURAVLEV KS
PAZDNIKOV NA
VOLODIN VA
GUTAKOVSKII AK
LEIER AF
SKORUPA W
YANKOV RA
Citation: Ga. Kachurin et al., PHOTOLUMINESCENCE OF SIO2 LAYERS IMPLANTED WITH SI+ IONS AND ANNEALEDIN A PULSED REGIME, Semiconductors, 31(6), 1997, pp. 626-630
Authors:
KACHURIN GA
ZHURAVLEV KS
PAZDNIKOV NA
LEIER AF
TYSCHENKO IE
VOLODIN VA
SKORUPA W
YANKOV RA
Citation: Ga. Kachurin et al., ANNEALING EFFECTS IN LIGHT-EMITTING SI NANOSTRUCTURES FORMED IN SIO2 BY ION-IMPLANTATION AND TRANSIENT PREHEATING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 583-586
Authors:
KACHURIN GA
TYSCHENKO IE
ZHURAVLEV KS
PAZDNIKOV NA
VOLODIN VA
GUTAKOVSKY AK
LEIER AF
SKORUPA W
YANKOV RA
Citation: Ga. Kachurin et al., VISIBLE AND NEAR-INFRARED LUMINESCENCE FROM SILICON NANOSTRUCTURES FORMED BY ION-IMPLANTATION AND PULSE ANNEALING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(3), 1997, pp. 571-574
Authors:
REBOHLE L
TYSCHENKO IE
FROB H
LEO K
YANKOV RA
VONBORANY J
KACHURIN GA
SKORUPA W
Citation: L. Rebohle et al., BLUE AND VIOLET PHOTOLUMINESCENCE FROM HIGH-DOSE SI-IMPLANTED AND GE+-IMPLANTED SILICON DIOXIDE LAYERS(), Microelectronic engineering, 36(1-4), 1997, pp. 107-110
Authors:
REBOHLE L
VONBORANY J
YANKOV RA
SKORUPA W
TYSCHENKO IE
FROB H
LEO K
Citation: L. Rebohle et al., STRONG BLUE AND VIOLET PHOTOLUMINESCENCE AND ELECTROLUMINESCENCE FROMGERMANIUM-IMPLANTED AND SILICON-IMPLANTED SILICON-DIOXIDE LAYERS, Applied physics letters, 71(19), 1997, pp. 2809-2811
Citation: Gv. Gadiyak et al., EFFECT OF COMPETING TRAPPING CENTERS (SINKS) ON THE EVOLUTION OF IMPLANTED-NITROGEN DISTRIBUTION IN SILICON - A NUMERICAL-SIMULATION, Semiconductors, 30(11), 1996, pp. 1019-1023
Authors:
ANTONOVA IV
KACHURIN GA
TYSCHENKO IE
SHAIMEEV SS
Citation: Iv. Antonova et al., FORMATION OF ELECTRICALLY ACTIVE-CENTERS BEYOND THE STOPPING RANGES OF IONS IMPLANTED IN HEATED SILICON, Semiconductors, 30(11), 1996, pp. 1051-1054
Authors:
SKORUPA W
YANKOV RA
REBOHLE L
FROB H
BOHME T
LEO K
TYSCHENKO IE
KACHURIN GA
Citation: W. Skorupa et al., A STUDY OF THE BLUE PHOTOLUMINESCENCE EMISSION FROM THERMALLY-GROWN, SI-IMPLANTED SIO2-FILMS AFTER SHORT-TIME ANNEALING(), Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 120(1-4), 1996, pp. 106-109
Authors:
KACHURIN GA
TYSCHENKO IE
TIIS SA
PLOTNIKOV AE
Citation: Ga. Kachurin et al., EFFECT OF COMPETING PRECIPITATION CENTERS ON THE DISTRIBUTION OF NITROGEN-IMPLANTED IN SI DURING THE FORMATION OF BURIED LAYERS, Semiconductors, 29(3), 1995, pp. 256-258
Authors:
KACHURIN GA
OBODNIKOV VI
PRINTS VY
TYSCHENKO IE
Citation: Ga. Kachurin et al., NEUTRALIZATION OF BORON IN SILICON BY HIGH-TEMPERATURE BOMBARDMENT WITH ARGON IONS, Semiconductors, 28(3), 1994, pp. 313-316
Citation: Ga. Kachurin et Ie. Tyschenko, BEHAVIOR OF BORON AND NITROGEN IN A SURFACE-LAYER OF SILICON DURING SYNTHESIS OF BURIED LAYERS BY IMPLANTATION OF N+ IONS, Semiconductors, 27(7), 1993, pp. 658-662
Citation: Iv. Antonova et al., USE OF THE DLTS METHOD TO STUDY DEFECTS FORMED IN SILICON AS A RESULTOF BOMBARDING IT WITH N-TEMPERATURES( IONS AT HIGH), Semiconductors, 27(2), 1993, pp. 130-133
Authors:
KACHURIN GA
AKHMETOV VD
TYSCHENKO IE
PLOTNIKOV AE
Citation: Ga. Kachurin et al., ROLES OF IMPLANTATION TEMPERATURE AND ION DOSE-RATE IN ION-BEAM SYNTHESIS OF BURIED SI3N4 LAYERS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 74(3), 1993, pp. 399-404