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Results: 1-25 | 26-26
Results: 1-25/26
COLLECTIVE WET ETCHING OF A 3D MONOLITHIC SILICON SEISMIC MASS SYSTEM
Authors: SCHROPFER G DELABACHELERIE M BALLANDRAS S BLIND P
Citation: G. Schropfer et al., COLLECTIVE WET ETCHING OF A 3D MONOLITHIC SILICON SEISMIC MASS SYSTEM, Journal of micromechanics and microengineering, 8(2), 1998, pp. 77-79
LATERAL OPTICAL ACCELEROMETER MICROMACHINED IN (100)-SILICON WITH REMOTE READOUT BASED ON COHERENCE MODULATION
Authors: SCHROPFER G ELFLEIN W DELABACHELERIE M PORTE H BALLANDRAS S
Citation: G. Schropfer et al., LATERAL OPTICAL ACCELEROMETER MICROMACHINED IN (100)-SILICON WITH REMOTE READOUT BASED ON COHERENCE MODULATION, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 344-349
PRECISE MODELING OF COMPLEX SAW STRUCTURES USING A PERTURBATION METHOD HYBRIDIZED WITH A FINITE-ELEMENT ANALYSIS
Authors: BALLANDRAS S BIGLER E
Citation: S. Ballandras et E. Bigler, PRECISE MODELING OF COMPLEX SAW STRUCTURES USING A PERTURBATION METHOD HYBRIDIZED WITH A FINITE-ELEMENT ANALYSIS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 45(3), 1998, pp. 567-573
FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON
Authors: SCHROPFER G BALLANDRAS S DELABACHELERIE M BLIND P ANSEL Y
Citation: G. Schropfer et al., FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON, Journal of micromechanics and microengineering, 7(2), 1997, pp. 71-78
TRANSVERSE-WAVES TRAPPED BY METALLIC GRATINGS DEPOSITED ON THIN QUARTZ PLATES
Authors: BRIOT JB BALLANDRAS S BIGLER E GAVIGNET E MARTIN G
Citation: Jb. Briot et al., TRANSVERSE-WAVES TRAPPED BY METALLIC GRATINGS DEPOSITED ON THIN QUARTZ PLATES, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 543-550
MICROSTEREOPHOTOLITHOGRAPHY AND SHAPE-MEMORY ALLOY FOR THE FABRICATION OF MINIATURIZED ACTUATORS
Authors: BALLANDRAS S CALIN M ZISSI S BERTSCH A ANDRE JC HAUDEN D
Citation: S. Ballandras et al., MICROSTEREOPHOTOLITHOGRAPHY AND SHAPE-MEMORY ALLOY FOR THE FABRICATION OF MINIATURIZED ACTUATORS, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 741-747
MICROGRIPPERS FABRICATED BY THE LIGA TECHNIQUE
Authors: BALLANDRAS S BASROUR S ROBERT L MEGTERT S BLIND P ROUILLAY M BERNEDE P DANIAU W
Citation: S. Ballandras et al., MICROGRIPPERS FABRICATED BY THE LIGA TECHNIQUE, Sensors and actuators. A, Physical, 58(3), 1997, pp. 265-272
DESIGN AND TEST OF 3 GHZ, FUNDAMENTAL MODE SURFACE TRANSVERSE-WAVE RESONATORS ON QUARTZ
Authors: BIGLER E GAVIGNET E BALLANDRAS S DENISSENKO S CAMBRIL E
Citation: E. Bigler et al., DESIGN AND TEST OF 3 GHZ, FUNDAMENTAL MODE SURFACE TRANSVERSE-WAVE RESONATORS ON QUARTZ, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 44(2), 1997, pp. 399-405
A PERTURBATION METHOD FOR MODELING THE THERMAL SENSITIVITY OF SURFACETRANSVERSE-WAVES
Authors: GAVIGNET E BALLANDRAS S BIGLER E
Citation: E. Gavignet et al., A PERTURBATION METHOD FOR MODELING THE THERMAL SENSITIVITY OF SURFACETRANSVERSE-WAVES, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 44(1), 1997, pp. 201-207
TEMPERATURE DERIVATIVES OF THE FUNDAMENTAL ELASTIC-CONSTANTS OF ISOTROPIC MATERIALS
Authors: BALLANDRAS S GAVIGNET E BIGLER E HENRY E
Citation: S. Ballandras et al., TEMPERATURE DERIVATIVES OF THE FUNDAMENTAL ELASTIC-CONSTANTS OF ISOTROPIC MATERIALS, Applied physics letters, 71(12), 1997, pp. 1625-1627
PROPAGATION OF TRANSVERSE-WAVES ON PIEZOELECTRIC PLATES SUPPORTING SINGLE OR DOUBLE SIDE METAL STRIP GRATINGS
Authors: BALLANDRAS S BRIOT JB GAVIGNET E BIGLER E
Citation: S. Ballandras et al., PROPAGATION OF TRANSVERSE-WAVES ON PIEZOELECTRIC PLATES SUPPORTING SINGLE OR DOUBLE SIDE METAL STRIP GRATINGS, The Journal of the Acoustical Society of America, 102(3), 1997, pp. 1335-1345
MINIATURIZED SHAPE-MEMORY ALLOY ACTUATORS FABRICATED USING MICROSTEREOPHOTOLITHOGRAPHY
Authors: BALLANDRAS S CALIN M ZISSI S BERTSCH A ANDRE JC BOURJAULT A HAUDEN D
Citation: S. Ballandras et al., MINIATURIZED SHAPE-MEMORY ALLOY ACTUATORS FABRICATED USING MICROSTEREOPHOTOLITHOGRAPHY, Journal de physique. III, 6(12), 1996, pp. 1759-1774
DESIGN AND FABRICATION OF SURFACE TRANSVE RSE-WAVE RESONATORS WITH THIN METAL STRIPS DEPOSITED ON QUARTZ SUBSTRATES
Authors: GAVIGNET E BALLANDRAS S BIGLER E BONJOUR C RENAUD JC DANIAU W
Citation: E. Gavignet et al., DESIGN AND FABRICATION OF SURFACE TRANSVE RSE-WAVE RESONATORS WITH THIN METAL STRIPS DEPOSITED ON QUARTZ SUBSTRATES, Journal de physique. III, 6(1), 1996, pp. 105-120
ANALYSIS AND EXPERIMENTAL-STUDY OF SURFACE TRANSVERSE-WAVE RESONATORSON QUARTZ
Authors: GAVIGNET E BALLANDRAS S BIGLER E BONJOUR C RENAUD JC DANIAU W
Citation: E. Gavignet et al., ANALYSIS AND EXPERIMENTAL-STUDY OF SURFACE TRANSVERSE-WAVE RESONATORSON QUARTZ, Journal of applied physics, 79(12), 1996, pp. 8944-8950
EXPERIMENTAL MEASUREMENTS OF STW PROPERTIES ON QUARTZ PLATES OF FINITE THICKNESS
Authors: BALLANDRAS S GAVIGNET E BIGLER E MARTIN G
Citation: S. Ballandras et al., EXPERIMENTAL MEASUREMENTS OF STW PROPERTIES ON QUARTZ PLATES OF FINITE THICKNESS, Electronics Letters, 32(4), 1996, pp. 413-414
SURFACE TRANSVERSE-WAVES ON PIEZOELECTRIC PLATES WITH METAL STRIP LAYERS DEPOSITED ON BOTH SIDES
Authors: BALLANDRAS S GAVIGNET E BIGLER E
Citation: S. Ballandras et al., SURFACE TRANSVERSE-WAVES ON PIEZOELECTRIC PLATES WITH METAL STRIP LAYERS DEPOSITED ON BOTH SIDES, Journal de physique. III, 5(9), 1995, pp. 1425-1436
SURFACE TRANSVERSE-WAVES UNDER METAL STRI P OR GROOVE GRATINGS ON PIEZOELECTRIC SUBSTRATES
Authors: GAVIGNET E BALLANDRAS S BIGLER E
Citation: E. Gavignet et al., SURFACE TRANSVERSE-WAVES UNDER METAL STRI P OR GROOVE GRATINGS ON PIEZOELECTRIC SUBSTRATES, Journal de physique. III, 5(7), 1995, pp. 1013-1025
INFLUENCE OF QUASI-STATIC 1ST-ORDER TEMPE RATURE EFFECTS ON SURFACE TRANSVERSE-WAVE DEVICES UNDER GROOVE GRATINGS
Authors: BALLANDRAS S GAVIGNET E BIGLER E
Citation: S. Ballandras et al., INFLUENCE OF QUASI-STATIC 1ST-ORDER TEMPE RATURE EFFECTS ON SURFACE TRANSVERSE-WAVE DEVICES UNDER GROOVE GRATINGS, Journal de physique. III, 5(2), 1995, pp. 161-174
STUDY OF THE SENSITIVITY OF QUARTZ SURFAC E-ACOUSTIC-WAVE OSCILLATORSTO STRESS EFFECT AND THERMAL-GRADIENTS
Authors: BALLANDRAS S BIGLER E BONJOUR C
Citation: S. Ballandras et al., STUDY OF THE SENSITIVITY OF QUARTZ SURFAC E-ACOUSTIC-WAVE OSCILLATORSTO STRESS EFFECT AND THERMAL-GRADIENTS, Acta acustica, 3(3), 1995, pp. 257-266
FABRICATION OF AN ELECTROSTATIC WOBBLE MICROMOTOR USING DEEP-ETCH UV LITHOGRAPHY, NICKEL ELECTROFORMING AND A TITANIUM SACRIFICIAL LAYER
Authors: DANIAU W BALLANDRAS S KUBAT L HARDIN J MARTIN G BASROUR S
Citation: W. Daniau et al., FABRICATION OF AN ELECTROSTATIC WOBBLE MICROMOTOR USING DEEP-ETCH UV LITHOGRAPHY, NICKEL ELECTROFORMING AND A TITANIUM SACRIFICIAL LAYER, Journal of micromechanics and microengineering, 5(4), 1995, pp. 270-275
DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING
Authors: BALLANDRAS S DANIAU W BASROUR S ROBERT L ROUILLAY M BLIND P BERNEDE P ROBERT D ROCHER S HAUDEN D MEGTERT S LABEQUE A ZEWEN L DEXPERT H COMES R ROUSSEAUX F RAVERT MF LAUNOIS H
Citation: S. Ballandras et al., DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING, Journal of micromechanics and microengineering, 5(3), 1995, pp. 203-208
THEORETICAL-ANALYSIS OF SURFACE TRANSVERSE-WAVES PROPAGATING ON A PIEZOELECTRIC SUBSTRATE UNDER SHALLOW GROOVE OR THIN METAL STRIP GRATINGS
Authors: GAVIGNET E BALLANDRAS S BIGLER E
Citation: E. Gavignet et al., THEORETICAL-ANALYSIS OF SURFACE TRANSVERSE-WAVES PROPAGATING ON A PIEZOELECTRIC SUBSTRATE UNDER SHALLOW GROOVE OR THIN METAL STRIP GRATINGS, Journal of applied physics, 77(12), 1995, pp. 6228-6233
APPLICATION OF THE LIGA PROCESS IN MICROO PTICS
Authors: BASROUR S BALLANDRAS S HAUDEN D
Citation: S. Basrour et al., APPLICATION OF THE LIGA PROCESS IN MICROO PTICS, Annales de physique, 20(5-6), 1995, pp. 693-700
DEEP-ETCH LITHOGRAPHY AT LURE-DCI STORAGE-RING
Authors: MEGTERT S LABEQUE A LIU ZW DEXPERT H COMES R ROUSSEAUX F RAVET MF LAUNOIS H BALLANDRAS S DANIAU W BASROUR S ROUILLAY M BLIND P HAUDEN D
Citation: S. Megtert et al., DEEP-ETCH LITHOGRAPHY AT LURE-DCI STORAGE-RING, Journal de physique. IV, 4(C9), 1994, pp. 269-272
MICROTECHNICAL APPLICATIONS OF DEEP-ETCH PHOTOLITHOGRAPHY USING UV AND SYNCHROTRON-RADIATION
Authors: BALLANDRAS S HAUDEN D
Citation: S. Ballandras et D. Hauden, MICROTECHNICAL APPLICATIONS OF DEEP-ETCH PHOTOLITHOGRAPHY USING UV AND SYNCHROTRON-RADIATION, Annales de physique, 19(5), 1994, pp. 73-85
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