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Results: 1-13 |
Results: 13
MEASUREMENT OF THE DIVERGENCE ANGLE OF THE ELECTRON-MICROPROBE OF A SCANNING ELECTRON-MICROSCOPE
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., MEASUREMENT OF THE DIVERGENCE ANGLE OF THE ELECTRON-MICROPROBE OF A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 39(12), 1996, pp. 1204-1206
CALIBRATION OF THE SCANNING ELECTRON-MICR OSCOPES
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., CALIBRATION OF THE SCANNING ELECTRON-MICR OSCOPES, Izvestia Akademii nauk SSSR. Seria fiziceskaa, 60(2), 1996, pp. 148-154
SEM MEASUREMENT OF THE LINEAR DIMENSIONS OF RELIEF SUBMICRON STRUCTURES BY THE METHOD OF INVARIANT POINTS
Authors: DANILOV VA NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Va. Danilov et al., SEM MEASUREMENT OF THE LINEAR DIMENSIONS OF RELIEF SUBMICRON STRUCTURES BY THE METHOD OF INVARIANT POINTS, Measurement techniques, 38(8), 1995, pp. 876-879
SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH INPUT DATA CHECKING
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH INPUT DATA CHECKING, Measurement techniques, 38(6), 1995, pp. 697-700
ACCURACY IN CALIBRATING ELECTRON-MICROSCOPES WITH SILICON SLOT STRUCTURES
Authors: NOVIKOV YA STEKOLIN IY
Citation: Ya. Novikov et Iy. Stekolin, ACCURACY IN CALIBRATING ELECTRON-MICROSCOPES WITH SILICON SLOT STRUCTURES, Measurement techniques, 38(5), 1995, pp. 590-593
MEASUREMENT OF LINEAR DIMENSIONS OF SUBMICRON STRUCTURES WITH A SCANNING ELECTRON-MICROSCOPE
Authors: DANILOV VA NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Va. Danilov et al., MEASUREMENT OF LINEAR DIMENSIONS OF SUBMICRON STRUCTURES WITH A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 38(4), 1995, pp. 398-402
CALIBRATION OF REM WITH ELIMINATION OF SYSTEMATIC LINEAR-GAUGE ERROR
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., CALIBRATION OF REM WITH ELIMINATION OF SYSTEMATIC LINEAR-GAUGE ERROR, Measurement techniques, 38(3), 1995, pp. 352-355
CALIBRATION OF SCANNING ELECTRON-MICROSCOPES BY MEANS OF PITCH STRUCTURES
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., CALIBRATION OF SCANNING ELECTRON-MICROSCOPES BY MEANS OF PITCH STRUCTURES, Measurement techniques, 38(2), 1995, pp. 242-245
MEASURING THE DIAMETER OF AN ELECTRON-PROBE WITH A SCANNING ELECTRON-MICROSCOPE
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., MEASURING THE DIAMETER OF AN ELECTRON-PROBE WITH A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 38(1), 1995, pp. 46-49
CALIBRATING A SCANNING ELECTRON-MICROSCOPE BY MEANS OF A LINEAR MEASURE HAVING ONE CERTIFIED DIMENSION
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., CALIBRATING A SCANNING ELECTRON-MICROSCOPE BY MEANS OF A LINEAR MEASURE HAVING ONE CERTIFIED DIMENSION, Measurement techniques, 37(7), 1994, pp. 841-844
SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY
Citation: Ya. Novikov et al., SCANNING ELECTRON-MICROSCOPE CALIBRATION WITH SIMULTANEOUS ELECTRON-PROBE DIAMETER DETERMINATION, Measurement techniques, 37(6), 1994, pp. 710-713
CALIBRATION OF SCANNING ELECTRON-MICROSCOPES FOR MEASURING THE DIMENSIONS OF SUBMICRON RELIEF ELEMENTS
Authors: NOVIKOV YA PESHEKHONOV SV RAKOV AV SIMONOV AN STEKOLIN IY STRIZHKOV IB TSYBULSKII VV
Citation: Ya. Novikov et al., CALIBRATION OF SCANNING ELECTRON-MICROSCOPES FOR MEASURING THE DIMENSIONS OF SUBMICRON RELIEF ELEMENTS, Measurement techniques, 36(8), 1993, pp. 947-950
DETERMINATION OF THE DIAMETER OF THE ELECTRON-PROBE OF A SCANNING ELECTRON-MICROSCOPE
Authors: NOVIKOV YA RAKOV AV STEKOLIN IY STRIZHKOV IB
Citation: Ya. Novikov et al., DETERMINATION OF THE DIAMETER OF THE ELECTRON-PROBE OF A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 36(12), 1993, pp. 1348-1350
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