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Results: 1-25 | 26-44
Results: 1-25/44
A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE
Authors: SANCHEZ S ELWENSPOEK M GUI CQ DENIVELLE MJME DEVRIES R DEKORTE PAJ BRUIJN MP WIJNBERGEN JJ MICHALKE W STEINBEISS E HEIDENBLUT T SCHWIERZI B
Citation: S. Sanchez et al., A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE, Journal of microelectromechanical systems, 7(1), 1998, pp. 62-68
AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING, Journal of microelectromechanical systems, 7(1), 1998, pp. 79-86
AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE, Journal of microelectromechanical systems, 7(1), 1998, pp. 87-93
NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES
Authors: GUI CQ LEGTENBERG R TILMANS HAC FLUITMAN JHJ ELWENSPOEK M
Citation: Cq. Gui et al., NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES, Journal of microelectromechanical systems, 7(1), 1998, pp. 122-127
PIEZORESISTIVE FRICTION FORCE SENSOR FOR TRIBOLOGICAL RESEARCH
Authors: BURGER J BERENSCHOT E BURGER GJ VISSCHER H ELWENSPOEK M
Citation: J. Burger et al., PIEZORESISTIVE FRICTION FORCE SENSOR FOR TRIBOLOGICAL RESEARCH, Journal of micromechanics and microengineering, 8(2), 1998, pp. 138-140
FABRICATION OF MULTILAYER SUBSTRATES FOR HIGH-ASPECT-RATIO SINGLE-CRYSTALLINE MICROSTRUCTURES
Authors: GUI C DEBOER M GARDENIERS JGE JANSEN H BERENSCHOT JW ELWENSPOEK M
Citation: C. Gui et al., FABRICATION OF MULTILAYER SUBSTRATES FOR HIGH-ASPECT-RATIO SINGLE-CRYSTALLINE MICROSTRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 61-66
MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR
Authors: TAS N WISSINK J SANDER L LAMMERINK T ELWENSPOEK M
Citation: N. Tas et al., MODELING, DESIGN AND TESTING OF THE ELECTROSTATIC SHUFFLE MOTOR, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 171-178
DIRECT MEASUREMENT OF PIEZOELECTRIC PROPERTIES OF SOL-GEL PZT FILMS
Authors: GARDENIERS JGE VERHOLEN AGBJ TAS NR ELWENSPOEK M
Citation: Jge. Gardeniers et al., DIRECT MEASUREMENT OF PIEZOELECTRIC PROPERTIES OF SOL-GEL PZT FILMS, Journal of the Korean Physical Society, 32, 1998, pp. 1573-1577
MECHANO-OPTICAL WAVE-GUIDE ON-OFF INTENSITY MODULATOR
Authors: VELDHUIS GJ GUI C NAUTA T KOSTER TM BERENSCHOT JW LAMBECK PV GARDENIERS JGE ELWENSPOEK M
Citation: Gj. Veldhuis et al., MECHANO-OPTICAL WAVE-GUIDE ON-OFF INTENSITY MODULATOR, Optics letters, 23(19), 1998, pp. 1532-1534
SCANNING ELECTRON-MICROSCOPIC, TRANSMISSION ELECTRON-MICROSCOPIC, ANDCONFOCAL LASER-SCANNING MICROSCOPIC OBSERVATION OF FIBROBLASTS CULTURED ON MICROGROOVED SURFACES OF BULK TITANIUM SUBSTRATA
Authors: DENBRABER ET JANSEN HV DEBOER MJ CROES HJE ELWENSPOEK M GINSEL LA JANSEN JA
Citation: Et. Denbraber et al., SCANNING ELECTRON-MICROSCOPIC, TRANSMISSION ELECTRON-MICROSCOPIC, ANDCONFOCAL LASER-SCANNING MICROSCOPIC OBSERVATION OF FIBROBLASTS CULTURED ON MICROGROOVED SURFACES OF BULK TITANIUM SUBSTRATA, Journal of biomedical materials research, 40(3), 1998, pp. 425-433
PRESENT AND FUTURE-ROLE OF CHEMICAL-MECHANICAL POLISHING IN WAFER BONDING
Authors: GUI C ELWENSPOEK M GARDENIERS JGE LAMBECK PV
Citation: C. Gui et al., PRESENT AND FUTURE-ROLE OF CHEMICAL-MECHANICAL POLISHING IN WAFER BONDING, Journal of the Electrochemical Society, 145(6), 1998, pp. 2198-2204
A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES
Authors: LEGTENBERG R BERENSCHOT E ELWENSPOEK M FLUITMAN JH
Citation: R. Legtenberg et al., A FABRICATION PROCESS FOR ELECTROSTATIC MICROACTUATORS WITH INTEGRATED GEAR LINKAGES, Journal of microelectromechanical systems, 6(3), 1997, pp. 234-241
ELECTROSTATIC CURVED ELECTRODE ACTUATORS
Authors: LEGTENBERG R GILBERT J SENTURIA SD ELWENSPOEK M
Citation: R. Legtenberg et al., ELECTROSTATIC CURVED ELECTRODE ACTUATORS, Journal of microelectromechanical systems, 6(3), 1997, pp. 257-265
DEFLECTION AND MAXIMUM LOAD OF MICROFILTRATION MEMBRANE SIEVES MADE WITH SILICON MICROMACHINING
Authors: VANRIJN C VANDERWEKKEN M NIJDAM W ELWENSPOEK M
Citation: C. Vanrijn et al., DEFLECTION AND MAXIMUM LOAD OF MICROFILTRATION MEMBRANE SIEVES MADE WITH SILICON MICROMACHINING, Journal of microelectromechanical systems, 6(1), 1997, pp. 48-54
SPONTANEOUS DIRECT BONDING OF THICK SILICON-NITRIDE
Authors: SANCHEZ S GUI C ELWENSPOEK M
Citation: S. Sanchez et al., SPONTANEOUS DIRECT BONDING OF THICK SILICON-NITRIDE, Journal of micromechanics and microengineering, 7(3), 1997, pp. 111-113
A NOVEL MICROMECHANICAL FLOW CONTROLLER
Authors: VANTOOR MW LAMMERINK TSJ GARDENIERS JGE ELWENSPOEK M MONSMA D
Citation: Mw. Vantoor et al., A NOVEL MICROMECHANICAL FLOW CONTROLLER, Journal of micromechanics and microengineering, 7(3), 1997, pp. 165-169
FUSION BONDING OF ROUGH SURFACES WITH POLISHING TECHNIQUE FOR SILICONMICROMACHINING
Authors: GUI C ALBERS H GARDENIERS JGE ELWENSPOEK M LAMBECK PV
Citation: C. Gui et al., FUSION BONDING OF ROUGH SURFACES WITH POLISHING TECHNIQUE FOR SILICONMICROMACHINING, Microsystem technologies, 3(3), 1997, pp. 122-128
RIE LAG IN HIGH-ASPECT-RATIO TRENCH ETCHING OF SILICON
Authors: JANSEN H DEBOER M WIEGERINK R TAS N SMULDERS E NEAGU C ELWENSPOEK M
Citation: H. Jansen et al., RIE LAG IN HIGH-ASPECT-RATIO TRENCH ETCHING OF SILICON, Microelectronic engineering, 35(1-4), 1997, pp. 45-50
DIGITAL COMPUTATION AND IN-SITU STM APPROACH OF SILICON ANISOTROPIC ETCHING
Authors: KASPARIAN J ELWENSPOEK M ALLONGUE P
Citation: J. Kasparian et al., DIGITAL COMPUTATION AND IN-SITU STM APPROACH OF SILICON ANISOTROPIC ETCHING, Surface science, 388(1-3), 1997, pp. 50-62
LOW-NOISE HIGH-T-C SUPERCONDUCTING BOLOMETERS ON SILICON-NITRIDE MEMBRANES FOR FAR-INFRARED DETECTION
Authors: DENIVELLE MJME BRUIJN MP DEVRIES R WIJNBERGEN JJ DEKORTE PAJ SANCHEZ S ELWENSPOEK M HEIDENBLUT T SCHWIERZI B MICHALKE W STEINBEISS E
Citation: Mjme. Denivelle et al., LOW-NOISE HIGH-T-C SUPERCONDUCTING BOLOMETERS ON SILICON-NITRIDE MEMBRANES FOR FAR-INFRARED DETECTION, Journal of applied physics, 82(10), 1997, pp. 4719-4726
AN ELECTROCHEMICAL ACTIVE VALVE
Authors: NEAGU CR GARDENIERS JGE ELWENSPOEK M KELLY JJ
Citation: Cr. Neagu et al., AN ELECTROCHEMICAL ACTIVE VALVE, Electrochimica acta, 42(20-22), 1997, pp. 3367-3373
A HIGH-T-C SUPERCONDUCTOR BOLOMETER FOR REMOTE-SENSING OF ATMOSPHERICOH
Authors: DENIVELLE MJME BRUIJN MP FRERICKS M DEVRIES R WIJNBERGEN JJ DEKORTE PAJ SANCHEZ S ELWENSPOEK M HEIDENBLUT T SCHWIERZI B MICHALKE W STEINBEISS E
Citation: Mjme. Denivelle et al., A HIGH-T-C SUPERCONDUCTOR BOLOMETER FOR REMOTE-SENSING OF ATMOSPHERICOH, Journal de physique. IV, 6(C3), 1996, pp. 423-428
AN ELECTROCHEMICAL MICROACTUATOR - PRINCIPLE AND FIRST RESULTS
Authors: NEAGU CR GARDENIERS JGE ELWENSPOEK M KELLY JJ
Citation: Cr. Neagu et al., AN ELECTROCHEMICAL MICROACTUATOR - PRINCIPLE AND FIRST RESULTS, Journal of microelectromechanical systems, 5(1), 1996, pp. 2-9
STICTION IN SURFACE MICROMACHINING
Authors: TAS N SONNENBERG T JANSEN H LEGTENBERG R ELWENSPOEK M
Citation: N. Tas et al., STICTION IN SURFACE MICROMACHINING, Journal of micromechanics and microengineering, 6(4), 1996, pp. 385-397
THE FORM OF ETCH RATE MINIMA IN WET CHEMICAL ANISOTROPIC ETCHING OF SILICON
Authors: ELWENSPOEK M
Citation: M. Elwenspoek, THE FORM OF ETCH RATE MINIMA IN WET CHEMICAL ANISOTROPIC ETCHING OF SILICON, Journal of micromechanics and microengineering, 6(4), 1996, pp. 405-409
Risultati: 1-25 | 26-44