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MASKLESS FABRICATION OF CONTACT VIAS BY FOCUSED MEV HEAVY-ION BEAM
Authors: MOKUNO Y HORINO Y KINOMURA A CHAYAHARA A KIUCHI M TAMURA S FUJII K TAKAI M
Citation: Y. Mokuno et al., MASKLESS FABRICATION OF CONTACT VIAS BY FOCUSED MEV HEAVY-ION BEAM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1292-1295
ION MONITORING OF ION-BEAM DYNAMIC MIXING PROCESS
Authors: CHAYAHARA A KIUCHI M MOKUNO Y HORINO Y FUJII K SATOU M
Citation: A. Chayahara et al., ION MONITORING OF ION-BEAM DYNAMIC MIXING PROCESS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 124-127
A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS
Authors: HORINO Y MOKUNO Y KINOMURA A CHAYAHARA A KIUCHI M FUJII K
Citation: Y. Horino et al., A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 424-427
HEAVY-ION MICROPROBES AND THEIR APPLICATIONS
Authors: TAKAI M HORINO Y MOKUNO Y CHAYAHARA A KIUCHI M FUJII K SATOU M
Citation: M. Takai et al., HEAVY-ION MICROPROBES AND THEIR APPLICATIONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 8-16
APPLICATION OF MEV HEAVY-ION MICROPROBES FOR PIXE MEASUREMENTS
Authors: MOKUNO Y HORINO Y CHAYAHARA A KIUCHI M FUJII K SATOU M TAKAI M
Citation: Y. Mokuno et al., APPLICATION OF MEV HEAVY-ION MICROPROBES FOR PIXE MEASUREMENTS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 128-131
APPLICATION OF A HEAVY-ION MICROPROBE FOR THE STUDY OF HUMAN NAILS
Authors: HORINO Y MOKUNO Y FUJII K TAKAI M
Citation: Y. Horino et al., APPLICATION OF A HEAVY-ION MICROPROBE FOR THE STUDY OF HUMAN NAILS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 294-297
OBSERVATION OF BURIED OXIDE LAYERS IN SILICON BY MICROPROBE RBS
Authors: KINOMURA A LOHNER T KATAYAMA Y TAKAI M RYSSEL H SCHORK R CHAYAHARA A HORINO Y FUJII K SATOU M
Citation: A. Kinomura et al., OBSERVATION OF BURIED OXIDE LAYERS IN SILICON BY MICROPROBE RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 369-372
INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES
Authors: MOKUNO Y HORINO Y CHAYAHARA A KIUCHI M FUJII K SATOU M TAKAI M
Citation: Y. Mokuno et al., INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 373-377
PIXE AND RBS STUDY OF RADIATION-INDUCED SEGREGATION IN SINGLE-CRYSTALAUSTENITIC STAINLESS-STEEL SUS-304
Authors: KAWATSURA K NAKAE T SHIMATANI N MAEDA K ARAI S MITAMURA T TERASAWA M IWASAKI H UCHIDA H KOTERAZAWA K HORINO Y MOKUNO Y FUJII K SATOU M SATAKA M IMAI M MAETA H
Citation: K. Kawatsura et al., PIXE AND RBS STUDY OF RADIATION-INDUCED SEGREGATION IN SINGLE-CRYSTALAUSTENITIC STAINLESS-STEEL SUS-304, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 75(1-4), 1993, pp. 367-370
MICROANALYSIS OF MATERIALS BY PIXE USING FOCUSED MEV HEAVY-ION BEAMS
Authors: HORINO Y MOKUNO Y FUJII K
Citation: Y. Horino et al., MICROANALYSIS OF MATERIALS BY PIXE USING FOCUSED MEV HEAVY-ION BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 75(1-4), 1993, pp. 535-538
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