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Results: 1-25/42
Authors:
SCHRODER H
OBERMEIER E
STECKENBORN A
Citation: H. Schroder et al., EFFECTS OF THE ETCHMASK PROPERTIES ON THE ANISOTROPY RATIO IN ANISOTROPIC ETCHING OF (100)SILICON IN AQUEOUS KOH, Journal of micromechanics and microengineering, 8(2), 1998, pp. 99-103
Authors:
DIEPOLD T
OBERMEIER E
BERCHTOLD A
Citation: T. Diepold et al., A MICROMACHINED CONTINUOUS INK-JET PRINT HEAD FOR HIGH-RESOLUTION PRINTING, Journal of micromechanics and microengineering, 8(2), 1998, pp. 144-147
Authors:
KRAGL H
HOHMANN R
MARHEINE C
POTT W
POMPE G
NEYER A
DIEPOLD T
OBERMEIER E
Citation: H. Kragl et al., INTEGRATED-OPTIC POLYMERIC COMPONENTS FABRICATED WITH MICROSTRUCTUREDSTRIP-OFF COVERS, Electronics Letters, 34(14), 1998, pp. 1396-1398
Authors:
KRAUS T
BALTZER M
OBERMEIER E
Citation: T. Kraus et al., DESIGN AND FABRICATION OF SURFACE MICROMACHINED MICROMOTORS WITH LARGE DIMENSIONS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 196-199
Authors:
ZAPPE S
BALTZER M
KRAUS T
OBERMEIER E
Citation: S. Zappe et al., ELECTROSTATICALLY DRIVEN LINEAR MICRO-ACTUATORS - FE ANALYSIS AND FABRICATION, Journal of micromechanics and microengineering, 7(3), 1997, pp. 204-209
Authors:
ZAPPE S
LEONE M
YANG F
OBERMEIER E
Citation: S. Zappe et al., CHARACTERIZATION OF SILICON-CARBIDE JFETS WITH RESPECT TO MICROSYSTEMS FOR HIGH-TEMPERATURE APPLICATIONS, Microsystem technologies, 3(3), 1997, pp. 134-138
Authors:
REICHERT W
LOSSY R
SIRGO MG
OBERMEIER E
SKORUPA W
Citation: W. Reichert et al., INVESTIGATION OF THE EFFECTS OF HIGH-TEMPERATURE IMPLANTATION AND POST IMPLANTATION ANNEALING ON THE ELECTRICAL BEHAVIOR OF NITROGEN-IMPLANTED BETA-SIC FILMS, DIAMOND AND RELATED MATERIALS, 6(10), 1997, pp. 1445-1447
Authors:
REICHERT W
OBERMEIER E
STOEMENOS J
Citation: W. Reichert et al., BETA-SIC FILMS ON SOI SUBSTRATES FOR HIGH-TEMPERATURE APPLICATIONS, DIAMOND AND RELATED MATERIALS, 6(10), 1997, pp. 1448-1450
Authors:
BLUET JM
CONTRERASAZEMA S
CAMASSEL J
ROBERT JL
DICIOCCIO L
REICHERT W
LOSSY R
OBERMEIER E
STOEMENOS J
Citation: Jm. Bluet et al., COMPARISON OF THE ELECTRICAL AND OPTICAL-PROPERTIES OF 3C-SIC ON SOI FROM DIFFERENT ORIGIN, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 152-155
Authors:
LOSSY R
REICHERT W
OBERMEIER E
Citation: R. Lossy et al., CHARACTERIZATION OF 3C-SIC DOPED BY NITROGEN IMPLANTATION, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 156-159
Authors:
REICHERT W
STEFAN D
OBERMEIER E
WONDRAK W
Citation: W. Reichert et al., FABRICATION OF SMOOTH BETA-SIC SURFACES BY REACTIVE ION ETCHING USINGA GRAPHITE ELECTRODE, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 190-194
Authors:
LOSSY R
REICHERT W
OBERMEIER E
SKORUPA W
Citation: R. Lossy et al., DOPING OF 3C-SIC BY IMPLANTATION OF NITROGEN AT HIGH-TEMPERATURES, Journal of electronic materials, 26(3), 1997, pp. 123-127
Authors:
MAIERSCHNEIDER D
KOPRULULU A
HOLM SB
OBERMEIER E
Citation: D. Maierschneider et al., ELASTIC PROPERTIES AND MICROSTRUCTURE OF LPCVD POLYSILICON FILMS, Journal of micromechanics and microengineering, 6(4), 1996, pp. 436-446
Authors:
DIEPOLD T
OBERMEIER E
Citation: T. Diepold et E. Obermeier, SMOOTHING OF ULTRASONICALLY DRILLED HOLES IN BOROSILICATE GLASS BY WET CHEMICAL ETCHING, Journal of micromechanics and microengineering, 6(1), 1996, pp. 29-32
Authors:
JANSEN E
OBERMEIER E
Citation: E. Jansen et E. Obermeier, THERMAL-CONDUCTIVITY MEASUREMENTS ON THIN-FILMS BASED ON MICROMECHANICAL DEVICES, Journal of micromechanics and microengineering, 6(1), 1996, pp. 118-121
Authors:
JANSEN E
DORSCH O
OBERMEIER E
KULISCH W
Citation: E. Jansen et al., THERMAL-CONDUCTIVITY MEASUREMENTS ON DIAMOND FILMS BASED ON MICROMECHANICAL DEVICES, DIAMOND AND RELATED MATERIALS, 5(6-8), 1996, pp. 644-648
Authors:
MUTSCHALL D
HOLZNER K
OBERMEIER E
Citation: D. Mutschall et al., SPUTTERED MOLYBDENUM OXIDE THIN-FILMS FOR NH3 DETECTION, Sensors and actuators. B, Chemical, 36(1-3), 1996, pp. 320-324
Authors:
QIU L
HEIN S
OBERMEIER E
SCHUBERT A
Citation: L. Qiu et al., MICRO GAS-FLOW SENSOR WITH INTEGRATED HEAT SINK AND FLOW GUIDE, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 547-551
Authors:
FRICKE J
OBERMEIER E
Citation: J. Fricke et E. Obermeier, AN ACCELEROMETER MADE IN A 2-LAYER SURFACE-MICROMACHINING TECHNOLOGY, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 651-655
Authors:
KRAUSE P
OBERMEIER E
WEHL W
Citation: P. Krause et al., A MICROMACHINED SINGLE-CHIP INKJET PRINTHEAD, Sensors and actuators. A, Physical, 53(1-3), 1996, pp. 405-409
Authors:
JANSEN E
OBERMEIER E
Citation: E. Jansen et E. Obermeier, MEASUREMENTS OF THE THERMAL-CONDUCTIVITY OF CVD DIAMOND FILMS USING MICROMECHANICAL DEVICES, Physica status solidi. a, Applied research, 154(1), 1996, pp. 395-402
Authors:
DICKERT FL
KEPPLER M
ZWISSLER GK
OBERMEIER E
Citation: Fl. Dickert et al., NETWORKS OF HYDROGEN-BONDS BETWEEN PYRIDONES - STRUCTURE BREAKING EFFECTS BY ORGANIC-SOLVENTS AND SENSOR APPLICATIONS, Berichte der Bunsengesellschaft fur Physikalische Chemie, 100(8), 1996, pp. 1312-1317
Authors:
MAIERSCHNEIDER D
MAIBACH J
OBERMEIER E
Citation: D. Maierschneider et al., A NEW ANALYTICAL SOLUTION FOR THE LOAD-DEFLECTION OF SQUARE MEMBRANES, Journal of microelectromechanical systems, 4(4), 1995, pp. 238-241
Authors:
SCHEIBE C
OBERMEIER E
Citation: C. Scheibe et E. Obermeier, COMPENSATING CORNER UNDERCUTTING IN ANISOTROPIC ETCHING OF (100) SILICON FOR CHIP SEPARATION, Journal of micromechanics and microengineering, 5(2), 1995, pp. 109-111
Authors:
KRAUSE P
OBERMEIER E
Citation: P. Krause et E. Obermeier, ETCH RATE AND SURFACE-ROUGHNESS OF DEEP NARROW U-GROOVES IN (110)-ORIENTED SILICON, Journal of micromechanics and microengineering, 5(2), 1995, pp. 112-114