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YUKIMURA K
OHNO K
KOTO M
KUROOKA S
SUZUKI Y
KINOMURA A
CHAYAHARA A
HORINO Y
Citation: K. Yukimura et al., TITANIUM ION-IMPLANTATION INTO SILICON SUBSTRATE BY PLASMA-BASED METAL-ION IMPLANTATION SYSTEM WITH 100-KV 2.5-A PULSE MODULATOR/, Surface & coatings technology, 104, 1998, pp. 252-256
Authors:
KOTO M
OHNO K
YOSHIKADO S
YUKIMURA K
KUROOKA S
SUZUKI Y
KINOMURA A
CHAYAHARA A
HORINO Y
Citation: M. Koto et al., TITANIUM IMPLANTATION PROFILES IN SILICON USING METAL PLASMA-BASED ION-IMPLANTATION TECHNIQUE, Materials chemistry and physics, 54(1-3), 1998, pp. 127-130
Authors:
TSUBOUCHI N
HORINO Y
ENDERS B
CHAYAHARA A
KINOMURA A
FUJII K
Citation: N. Tsubouchi et al., CHARACTERIZATION OF CARBON NITRIDE FILMS PRODUCED BY SIMULTANEOUS LOW-ENERGY DUAL-ION BEAMS IRRADIATION, Materials chemistry and physics, 54(1-3), 1998, pp. 325-329
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MOKUNO Y
HORINO Y
TADIC T
TERASAWA M
SEKIOKA T
CHAYAHARA A
KINOMURA A
TSUBOUCHI N
FUJII K
Citation: Y. Mokuno et al., HIGH-ENERGY RESOLUTION PIXE ANALYSIS USING FOCUSED MEV HEAVY-ION BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 368-372
Authors:
CHAYAHARA A
HORINO Y
TSUBOUCHI N
KINOMURA A
FUJII K
Citation: A. Chayahara et al., APPROACH TO FORMATION OF ULTRA-PURE METAL-FILMS BY MEANS OF ION-BEAM TECHNOLOGY, Physica status solidi. a, Applied research, 167(2), 1998, pp. 405-410
Authors:
KINOMURA A
WILLIAMS JS
WONGLEUNG J
PETRAVIC M
NAKANO Y
HAYASHI Y
Citation: A. Kinomura et al., EFFICIENT GETTERING OF LOW CONCENTRATIONS OF COPPER CONTAMINATION TO HYDROGEN-INDUCED NANOCAVITIES IN SILICON, Applied physics letters, 73(18), 1998, pp. 2639-2641
Authors:
KINOMURA A
WILLIAMS JS
WONGLEUNG J
PETRAVIC M
Citation: A. Kinomura et al., MICROSTRUCTURAL DIFFERENCE BETWEEN PLATINUM AND SILVER TRAPPED IN HYDROGEN-INDUCED CAVITIES IN SILICON, Applied physics letters, 72(21), 1998, pp. 2713-2715
Authors:
TSUBOUCHI N
HORINO Y
ENDERS B
CHAYAHARA A
KINOMURA A
FUJII K
Citation: N. Tsubouchi et al., KINETIC-ENERGY INFLUENCE OF HYPERTHERMAL DUAL-ION BEAMS ON BONDING AND OPTICAL-PROPERTIES OF CARBON NITRIDE FILMS, Applied physics letters, 72(12), 1998, pp. 1412-1414
Authors:
MOKUNO Y
HORINO Y
CHAYAHARA A
KINOMURA A
TSUBOUCHI N
FUJII K
TERASAWA M
SEKIOKA T
MITAMURA T
Citation: Y. Mokuno et al., HIGH-ENERGY RESOLUTION PIXE WITH HIGH-EFFICIENCY USING THE HEAVY-ION MICROBEAM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 243-246
Authors:
KISHIMOTO T
TAKAI M
OHNO Y
NISHIMURA T
INUISHI M
KINOMURA A
HORINO Y
FUJII K
Citation: T. Kishimoto et al., SUPPRESSION OF CHARGE-CARRIER COLLECTION IN DIODE WITH RETROGRADE WELL AND EPITAXIAL LAYERS FOR SOFT-ERROR IMMUNITY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 524-527
Authors:
PARK YK
PASZTI F
TAKAI M
TEMMEL G
BUERTE EP
RYSSEL H
WIGET R
KINOMURA A
HORINO Y
FUJII K
Citation: Yk. Park et al., IR AND RH SILICIDE FORMATION INVESTIGATED BY MICROPROBE RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 728-733
Authors:
KINOMURA A
WILLIAMS JS
WONGLEUNG J
PETRAVIC M
Citation: A. Kinomura et al., GETTERING OF PLATINUM AND SILVER TO CAVITIES FORMED BY HYDROGEN IMPLANTATION IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 297-300
Authors:
ENDERS B
HORINO Y
TSUBOUCHI N
CHAYAHARA A
KINOMURA A
FUJII K
Citation: B. Enders et al., CARBON NITRIDE THIN-FILMS FORMED BY LOW-ENERGY ION-BEAM DEPOSITION WITH POSITIVE AND NEGATIVE-IONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 121(1-4), 1997, pp. 73-78
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HORINO Y
TSUBOUCHI N
ENDERS B
HECK C
CHAYAHARA A
KINOMURA A
FUJII K
Citation: Y. Horino et al., DEVELOPMENT OF A NEW ION-BEAM DEPOSITION TECHNOLOGY FOR ULTRA-HIGH-PURITY FILM FABRICATION, Physica status solidi. a, Applied research, 160(2), 1997, pp. 583-589
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MOKUNO Y
HORINO Y
KINOMURA A
CHAYAHARA A
TSUBOUCHI N
FUJII K
Citation: Y. Mokuno et al., PIXE ANALYSIS OF HEAVY-ELEMENTS IN SILICON USING MEV HEAVY-ION BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 109, 1996, pp. 573-575
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LU YF
CHOI WK
AOYAGI Y
KINOMURA A
FUJII K
Citation: Yf. Lu et al., CONTROLLABLE LASER-INDUCED PERIODIC STRUCTURES AT SILICON-DIOXIDE SILICON INTERFACE BY EXCIMER-LASER IRRADIATION/, Journal of applied physics, 80(12), 1996, pp. 7052-7056
Authors:
TAKAI M
KISHIMOTO T
OHNO Y
SAYAMA H
SONODA K
SATOH S
NISHIMURA T
MIYOSHI H
KINOMURA A
HORINO Y
FUJII K
Citation: M. Takai et al., SOFT ERROR SUSCEPTIBILITY AND IMMUNE STRUCTURES IN DYNAMIC RANDOM-ACCESS MEMORIES (DRAMS) INVESTIGATED BY NUCLEAR MICROPROBES, IEEE transactions on nuclear science, 43(2), 1996, pp. 696-704
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KISHIMOTO T
PARK YK
TAKAI M
OHNO Y
SONODA K
SAYAMA H
NISHIMURA T
KINOMURA A
HORINO Y
FUJII K
Citation: T. Kishimoto et al., WELL STRUCTURE BY HIGH-ENERGY BORON IMPLANTATION FOR SOFT-ERROR REDUCTION IN DYNAMIC RANDOM-ACCESS MEMORIES (DRAMS), JPN J A P 1, 34(12B), 1995, pp. 6899-6902
Authors:
YAMAMOTO O
SEYAMA T
JO T
TERATO H
SAITO T
KINOMURA A
Citation: O. Yamamoto et al., ORAL-ADMINISTRATION OF TRITIATED-WATER (HTO) IN MOUSE .2. TUMOR-DEVELOPMENT, International journal of radiation biology, 68(1), 1995, pp. 47-54
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TAKAI M
KISHIMOTO T
SAYAMA H
OHNO Y
SONODA K
NISHIMURA T
KINOMURA A
HORINO Y
FUJII K
Citation: M. Takai et al., DIRECT MEASUREMENT AND IMPROVEMENT OF LOCAL SOFT ERROR SUSCEPTIBILITYIN DYNAMIC RANDOM-ACCESS MEMORIES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 562-565
Authors:
TAKAI M
KISHIMOTO T
SAYAMA H
OHNO Y
SONODA K
NISHIMURA T
KINOMURA A
HORINO Y
FUJII K
Citation: M. Takai et al., ION-INDUCED CURRENT MEASUREMENT FOR OPTIMIZATION OF BURIED IMPLANTED LAYERS AGAINST SOFT ERRORS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 425-428
Authors:
KINOMURA A
CHAYAHARA A
HORINO Y
MOKUNO Y
FUJII K
Citation: A. Kinomura et al., ION MASS DEPENDENCE OF NORMALIZED REGROWTH RATE IN MEV ION-BEAM-INDUCED EPITAXIAL CRYSTALLIZATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 277-280
Authors:
HORINO Y
MOKUNO Y
TSUBOUCHI N
KINOMURA A
CHAYAHARA A
FUJII K
Citation: Y. Horino et al., ANALYSIS OF IRON BY PIXE USING HEAVY-ION MICROPROBES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 49-51
Authors:
KINOMURA A
HORINO Y
MOKUNO Y
CHAYAHARA A
FUJII K
Citation: A. Kinomura et al., DAMAGE OF POLYIMIDE THIN-FILMS IRRADIATED BY MEV PROTON MICROBEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 55-58