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Authors: YUKIMURA K OHNO K KOTO M KUROOKA S SUZUKI Y KINOMURA A CHAYAHARA A HORINO Y
Citation: K. Yukimura et al., TITANIUM ION-IMPLANTATION INTO SILICON SUBSTRATE BY PLASMA-BASED METAL-ION IMPLANTATION SYSTEM WITH 100-KV 2.5-A PULSE MODULATOR/, Surface & coatings technology, 104, 1998, pp. 252-256

Authors: KOTO M OHNO K YOSHIKADO S YUKIMURA K KUROOKA S SUZUKI Y KINOMURA A CHAYAHARA A HORINO Y
Citation: M. Koto et al., TITANIUM IMPLANTATION PROFILES IN SILICON USING METAL PLASMA-BASED ION-IMPLANTATION TECHNIQUE, Materials chemistry and physics, 54(1-3), 1998, pp. 127-130

Authors: TSUBOUCHI N HORINO Y ENDERS B CHAYAHARA A KINOMURA A FUJII K
Citation: N. Tsubouchi et al., CHARACTERIZATION OF CARBON NITRIDE FILMS PRODUCED BY SIMULTANEOUS LOW-ENERGY DUAL-ION BEAMS IRRADIATION, Materials chemistry and physics, 54(1-3), 1998, pp. 325-329

Authors: MOKUNO Y HORINO Y TADIC T TERASAWA M SEKIOKA T CHAYAHARA A KINOMURA A TSUBOUCHI N FUJII K
Citation: Y. Mokuno et al., HIGH-ENERGY RESOLUTION PIXE ANALYSIS USING FOCUSED MEV HEAVY-ION BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 368-372

Authors: CHAYAHARA A HORINO Y TSUBOUCHI N KINOMURA A FUJII K
Citation: A. Chayahara et al., APPROACH TO FORMATION OF ULTRA-PURE METAL-FILMS BY MEANS OF ION-BEAM TECHNOLOGY, Physica status solidi. a, Applied research, 167(2), 1998, pp. 405-410

Authors: KINOMURA A WILLIAMS JS WONGLEUNG J PETRAVIC M NAKANO Y HAYASHI Y
Citation: A. Kinomura et al., EFFICIENT GETTERING OF LOW CONCENTRATIONS OF COPPER CONTAMINATION TO HYDROGEN-INDUCED NANOCAVITIES IN SILICON, Applied physics letters, 73(18), 1998, pp. 2639-2641

Authors: KINOMURA A WILLIAMS JS WONGLEUNG J PETRAVIC M
Citation: A. Kinomura et al., MICROSTRUCTURAL DIFFERENCE BETWEEN PLATINUM AND SILVER TRAPPED IN HYDROGEN-INDUCED CAVITIES IN SILICON, Applied physics letters, 72(21), 1998, pp. 2713-2715

Authors: TSUBOUCHI N HORINO Y ENDERS B CHAYAHARA A KINOMURA A FUJII K
Citation: N. Tsubouchi et al., KINETIC-ENERGY INFLUENCE OF HYPERTHERMAL DUAL-ION BEAMS ON BONDING AND OPTICAL-PROPERTIES OF CARBON NITRIDE FILMS, Applied physics letters, 72(12), 1998, pp. 1412-1414

Authors: MOKUNO Y HORINO Y CHAYAHARA A KINOMURA A TSUBOUCHI N FUJII K TERASAWA M SEKIOKA T MITAMURA T
Citation: Y. Mokuno et al., HIGH-ENERGY RESOLUTION PIXE WITH HIGH-EFFICIENCY USING THE HEAVY-ION MICROBEAM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 243-246

Authors: KISHIMOTO T TAKAI M OHNO Y NISHIMURA T INUISHI M KINOMURA A HORINO Y FUJII K
Citation: T. Kishimoto et al., SUPPRESSION OF CHARGE-CARRIER COLLECTION IN DIODE WITH RETROGRADE WELL AND EPITAXIAL LAYERS FOR SOFT-ERROR IMMUNITY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 524-527

Authors: PARK YK PASZTI F TAKAI M TEMMEL G BUERTE EP RYSSEL H WIGET R KINOMURA A HORINO Y FUJII K
Citation: Yk. Park et al., IR AND RH SILICIDE FORMATION INVESTIGATED BY MICROPROBE RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 130(1-4), 1997, pp. 728-733

Authors: KINOMURA A WILLIAMS JS WONGLEUNG J PETRAVIC M
Citation: A. Kinomura et al., GETTERING OF PLATINUM AND SILVER TO CAVITIES FORMED BY HYDROGEN IMPLANTATION IN SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 127, 1997, pp. 297-300

Authors: ENDERS B HORINO Y TSUBOUCHI N CHAYAHARA A KINOMURA A FUJII K
Citation: B. Enders et al., CARBON NITRIDE THIN-FILMS FORMED BY LOW-ENERGY ION-BEAM DEPOSITION WITH POSITIVE AND NEGATIVE-IONS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 121(1-4), 1997, pp. 73-78

Authors: HORINO Y TSUBOUCHI N ENDERS B HECK C CHAYAHARA A KINOMURA A FUJII K
Citation: Y. Horino et al., DEVELOPMENT OF A NEW ION-BEAM DEPOSITION TECHNOLOGY FOR ULTRA-HIGH-PURITY FILM FABRICATION, Physica status solidi. a, Applied research, 160(2), 1997, pp. 583-589

Authors: FUJII F HORINO Y TSUBOUCHI N ENDERS B CHAYAHARA A KINOMURA A
Citation: F. Fujii et al., ION-BEAM DEPOSITION WITH POSITIVE AND NEGATIVE-IONS, Surface & coatings technology, 84(1-3), 1996, pp. 544-549

Authors: MOKUNO Y HORINO Y KINOMURA A CHAYAHARA A TSUBOUCHI N FUJII K
Citation: Y. Mokuno et al., PIXE ANALYSIS OF HEAVY-ELEMENTS IN SILICON USING MEV HEAVY-ION BEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 109, 1996, pp. 573-575

Authors: LU YF CHOI WK AOYAGI Y KINOMURA A FUJII K
Citation: Yf. Lu et al., CONTROLLABLE LASER-INDUCED PERIODIC STRUCTURES AT SILICON-DIOXIDE SILICON INTERFACE BY EXCIMER-LASER IRRADIATION/, Journal of applied physics, 80(12), 1996, pp. 7052-7056

Authors: TAKAI M KISHIMOTO T OHNO Y SAYAMA H SONODA K SATOH S NISHIMURA T MIYOSHI H KINOMURA A HORINO Y FUJII K
Citation: M. Takai et al., SOFT ERROR SUSCEPTIBILITY AND IMMUNE STRUCTURES IN DYNAMIC RANDOM-ACCESS MEMORIES (DRAMS) INVESTIGATED BY NUCLEAR MICROPROBES, IEEE transactions on nuclear science, 43(2), 1996, pp. 696-704

Authors: KISHIMOTO T PARK YK TAKAI M OHNO Y SONODA K SAYAMA H NISHIMURA T KINOMURA A HORINO Y FUJII K
Citation: T. Kishimoto et al., WELL STRUCTURE BY HIGH-ENERGY BORON IMPLANTATION FOR SOFT-ERROR REDUCTION IN DYNAMIC RANDOM-ACCESS MEMORIES (DRAMS), JPN J A P 1, 34(12B), 1995, pp. 6899-6902

Authors: YAMAMOTO O SEYAMA T JO T TERATO H SAITO T KINOMURA A
Citation: O. Yamamoto et al., ORAL-ADMINISTRATION OF TRITIATED-WATER (HTO) IN MOUSE .2. TUMOR-DEVELOPMENT, International journal of radiation biology, 68(1), 1995, pp. 47-54

Authors: TAKAI M KISHIMOTO T SAYAMA H OHNO Y SONODA K NISHIMURA T KINOMURA A HORINO Y FUJII K
Citation: M. Takai et al., DIRECT MEASUREMENT AND IMPROVEMENT OF LOCAL SOFT ERROR SUSCEPTIBILITYIN DYNAMIC RANDOM-ACCESS MEMORIES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 99(1-4), 1995, pp. 562-565

Authors: TAKAI M KISHIMOTO T SAYAMA H OHNO Y SONODA K NISHIMURA T KINOMURA A HORINO Y FUJII K
Citation: M. Takai et al., ION-INDUCED CURRENT MEASUREMENT FOR OPTIMIZATION OF BURIED IMPLANTED LAYERS AGAINST SOFT ERRORS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 96(1-2), 1995, pp. 425-428

Authors: KINOMURA A CHAYAHARA A HORINO Y MOKUNO Y FUJII K
Citation: A. Kinomura et al., ION MASS DEPENDENCE OF NORMALIZED REGROWTH RATE IN MEV ION-BEAM-INDUCED EPITAXIAL CRYSTALLIZATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 106(1-4), 1995, pp. 277-280

Authors: HORINO Y MOKUNO Y TSUBOUCHI N KINOMURA A CHAYAHARA A FUJII K
Citation: Y. Horino et al., ANALYSIS OF IRON BY PIXE USING HEAVY-ION MICROPROBES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 49-51

Authors: KINOMURA A HORINO Y MOKUNO Y CHAYAHARA A FUJII K
Citation: A. Kinomura et al., DAMAGE OF POLYIMIDE THIN-FILMS IRRADIATED BY MEV PROTON MICROBEAMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 55-58
Risultati: 1-25 | 26-43