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Results: 26-43/43
Authors:
KISHIMOTO T
SAYAMA H
TAKAI M
OHNO Y
SONODA K
NISHIMURA T
KINOMURA A
HORINO Y
FUJII K
Citation: T. Kishimoto et al., OPTIMIZATION OF BURIED IMPLANTED LAYER IN DYNAMIC RANDOM-ACCESS MEMORIES BY SOFT ERROR MAPPING AND ION-BEAM-INDUCED CURRENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 104(1-4), 1995, pp. 515-518
Authors:
HORINO Y
MOKUNO Y
KINOMURA A
CHAYAHARA A
FUJII K
Citation: Y. Horino et al., APPLICATION OF A MEV NICKEL ION-BEAM FOR PIXE ANALYSIS OF IRON NEAR-THE-SURFACE OF A SILICON-WAFER, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 100(1), 1995, pp. 122-124
Authors:
KISHIMOTO T
SAYAMA H
TAKAI M
OHNO Y
SONODA K
NISHIMURA T
KINOMURA A
HORINO Y
FUJII K
Citation: T. Kishimoto et al., ESTIMATION OF CARRIER SUPPRESSION BY HIGH-ENERGY BORON-IMPLANTED LAYER FOR SOFT ERROR REDUCTION, JPN J A P 1, 33(12B), 1994, pp. 7148-7150
Authors:
TAKAI M
KATAYAMA Y
LOHNER T
KINOMURA A
RYSSEL H
TSIEN PH
BURTE E
SATOU M
CHAYAHARA A
Citation: M. Takai et al., NUCLEAR MICROPROBE APPLICATION TO SEMICONDUCTOR PROCESS-DEVELOPMENT -SILICIDE FORMATION AND MULTILAYERED STRUCTURE, Radiation effects and defects in solids, 127(3-4), 1994, pp. 357-365
Authors:
KIUCHI M
CHAYAHARA A
KINOMURA A
Citation: M. Kiuchi et al., NITRIDATION OF VANADIUM BY ION-BEAM IRRADIATION, Surface & coatings technology, 65(1-3), 1994, pp. 142-147
Authors:
HORINO Y
MOKUNO Y
KINOMURA A
CHAYAHARA A
FUJII K
Citation: Y. Horino et al., HEAVY-ION MICROPROBE FOR PIXE ANALYSIS OF IRON, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 353(1-3), 1994, pp. 619-622
Authors:
KINOMURA A
HORINO Y
MOKUNO Y
CHAYAHARA A
KIUCHI M
FUJII K
TAKAI M
LU YF
Citation: A. Kinomura et al., 3-DIMENSIONAL ANALYSIS OF LOCALLY DEPOSITED SILICON-OXIDE ON FERRITE BY A COMBINATION OF MICROPROBE RBS AND PIXE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 689-692
Authors:
MOKUNO Y
HORINO Y
KINOMURA A
CHAYAHARA A
KIUCHI M
FUJII K
TAKAI M
Citation: Y. Mokuno et al., MEV HEAVY-ION MICROPROBE PIXE FOR THE ANALYSIS OF THE MATERIALS SURFACE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 741-743
Authors:
TAKAI M
HARA S
LEE C
KINOMURA A
LOHNER T
Citation: M. Takai et al., CHANNELING CONTRAST ANALYSIS OF GAAS SIDE-WALLS FABRICATED BY LASER WET CHEMICAL ETCHING, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 752-755
Authors:
KINOMURA A
HORINO Y
MOKUNO Y
CHAYAHARA A
KIUCHI M
FUJII K
TAKAI M
LOHNER T
RYSSEL H
SCHORK R
Citation: A. Kinomura et al., OBSERVATION OF LOCAL SIMOX LAYERS BY MICROPROBE RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 921-924
Authors:
CHAYAHARA A
KIUCHI M
KINOMURA A
MOKUNO Y
HORINO Y
FUJII K
Citation: A. Chayahara et al., FORMATION OF CRYSTALLINE SIC BURIED LAYER BY HIGH-DOSE IMPLANTATION OF MEV CARBON-IONS AT HIGH-TEMPERATURE, JPN J A P 2, 32(9A), 1993, pp. 120001286-120001288
Authors:
HIRONO Y
MOKUNO Y
KINOMURA A
FUJII K
YUMOTO S
Citation: Y. Hirono et al., MICRO-PIXE (PARTICLE-INDUCED X-RAY-EMISSION) ANALYSIS OF ALUMINUM IN RAT-LIVER USING MEV HEAVY-ION MICROPROBES, Scanning microscopy, 7(4), 1993, pp. 1215-1220
Authors:
MOKUNO Y
HORINO Y
KINOMURA A
CHAYAHARA A
KIUCHI M
TAMURA S
FUJII K
TAKAI M
Citation: Y. Mokuno et al., MASKLESS FABRICATION OF CONTACT VIAS BY FOCUSED MEV HEAVY-ION BEAM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1292-1295
Authors:
SAYAMA H
KINOMURA A
YUBA Y
TAKAI M
Citation: H. Sayama et al., NEAR-SURFACE DEFECTS FORMED BY MEV ION-IMPLANTATION INTO SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 587-590
Authors:
HORINO Y
MOKUNO Y
KINOMURA A
CHAYAHARA A
KIUCHI M
FUJII K
Citation: Y. Horino et al., A HEAVY-ION MICROPROBE AND ITS APPLICATION TO MULTIDIMENSIONAL PROCESSING AND ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 79(1-4), 1993, pp. 424-427
Authors:
KINOMURA A
ANDOH H
TAKAI M
Citation: A. Kinomura et al., MICRO-RBS ANALYSIS USING A TOROIDAL ELECTROSTATIC ANALYZER, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 140-143
Authors:
TAKAI M
KATAYAMA Y
KINOMURA A
Citation: M. Takai et al., DATA-PROCESSING FOR RBS TOMOGRAPHY ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 229-233
Authors:
KINOMURA A
LOHNER T
KATAYAMA Y
TAKAI M
RYSSEL H
SCHORK R
CHAYAHARA A
HORINO Y
FUJII K
SATOU M
Citation: A. Kinomura et al., OBSERVATION OF BURIED OXIDE LAYERS IN SILICON BY MICROPROBE RBS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 77(1-4), 1993, pp. 369-372