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Results: 1-25/29
Authors:
Hioki, K
Itazu, N
Petrovic, ZL
Makabe, T
Citation: K. Hioki et al., Optical emission spectroscopy of pulsed inductively coupled plasma in Ar, JPN J A P 2, 40(11A), 2001, pp. L1183-L1186
Authors:
Makabe, T
Citation: T. Makabe, Radio-frequency plasma modeling for low-temperature processing, ADV ATOM MO, 44, 2001, pp. 127-154
Authors:
Shidoji, E
Ness, K
Makabe, T
Citation: E. Shidoji et al., Influence of gas pressure and magnetic field upon de magnetron discharge, VACUUM, 60(3), 2001, pp. 299-306
Authors:
Hou, K
Nakagarni, S
Makabe, T
Citation: K. Hou et al., Temporal characteristics of net excitation rates in inductively coupled plasma in Ar and CF4 by one-dimensional relaxation continuum modeling, THIN SOL FI, 386(2), 2001, pp. 239-242
Authors:
Matsui, J
Maeshige, K
Makabe, T
Citation: J. Matsui et al., Effect of aspect ratio on topographic dependent charging in oxide etching, J PHYS D, 34(19), 2001, pp. 2950-2955
Authors:
Kurihara, M
Makabe, T
Citation: M. Kurihara et T. Makabe, Two-dimensional modeling of a microcell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source, J APPL PHYS, 89(12), 2001, pp. 7756-7763
Authors:
Matsui, J
Nakano, N
Petrovic, ZL
Makabe, T
Citation: J. Matsui et al., The effect of topographical local charging on the etching of deep-submicron structures in SiO2 as a function of aspect ratio, APPL PHYS L, 78(7), 2001, pp. 883-885
Authors:
Oh, JS
Makabe, T
Citation: Js. Oh et T. Makabe, Numerical study of the effects of frequency in inductively coupled plasma using particle-in-cell/Monte Carlo simulation, JPN J A P 1, 39(3A), 2000, pp. 1358-1364
Authors:
Ness, K
Makabe, T
Citation: K. Ness et T. Makabe, Electron transport in argon in crossed electric and magnetic fields, PHYS REV E, 62(3), 2000, pp. 4083-4090
Authors:
Hioki, K
Hirata, H
Matsumura, S
Petrovic, ZL
Makabe, T
Citation: K. Hioki et al., Diagnostics of an inductively coupled CF4/Ar plasma, J VAC SCI A, 18(3), 2000, pp. 864-872
Authors:
Kurihara, M
Petrovic, ZL
Makabe, T
Citation: M. Kurihara et al., Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis, J PHYS D, 33(17), 2000, pp. 2146-2153
Authors:
Raspopovic, Z
Sakadzic, S
Petrovic, ZL
Makabe, T
Citation: Z. Raspopovic et al., Diffusion of electrons in time-dependent E(t) x B(t) fields, J PHYS D, 33(11), 2000, pp. 1298-1302
Authors:
Maeshige, K
Hasebe, M
Yamaguchi, Y
Makabe, T
Citation: K. Maeshige et al., Predictive study of a plasma structure and function in reactive ion etcherdriven by very high frequency: Validity of an extended two-dimensional relaxation continuum model, J APPL PHYS, 88(8), 2000, pp. 4518-4524
Authors:
Kitajima, T
Takeo, Y
Petrovic, ZL
Makabe, T
Citation: T. Kitajima et al., Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma, APPL PHYS L, 77(4), 2000, pp. 489-491
Authors:
Segawa, S
Kurihara, M
Nakano, N
Makabe, T
Citation: S. Segawa et al., Dependence of driving frequency on capacitively coupled plasma in CF4, JPN J A P 1, 38(7B), 1999, pp. 4416-4422
Authors:
Oh, JS
Makabe, T
Citation: Js. Oh et T. Makabe, A numerical study of a collision-dominated inductively coupled plasma using particle-in-cell/Monte Carlo simulation, JPN J A P 1, 38(7B), 1999, pp. 4423-4428
Authors:
Kamimura, K
Iyanagi, K
Nakano, N
Makabe, T
Citation: K. Kamimura et al., Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma, JPN J A P 1, 38(7B), 1999, pp. 4429-4435
Authors:
Shidoji, E
Ohtake, H
Nakano, N
Makabe, T
Citation: E. Shidoji et al., Two-dimensional self-consistent simulation of a DC magnetron discharge, JPN J A P 1, 38(4A), 1999, pp. 2131-2136
Authors:
Bzenic, S
Petrovic, ZL
Raspopovic, ZM
Makabe, T
Citation: S. Bzenic et al., Drift velocities of electrons in time varying electric fields, JPN J A P 1, 38(10), 1999, pp. 6077-6083
Authors:
Kitajima, T
Takeo, Y
Makabe, T
Citation: T. Kitajima et al., Two-dimensional CT images of two-frequency capacitively coupled plasma, J VAC SCI A, 17(5), 1999, pp. 2510-2516
Authors:
Makabe, T
Citation: T. Makabe, Ethnic hegemony: the Japanese Brazilians in agriculture, 1908-1968, ETHN RACIAL, 22(4), 1999, pp. 702-723
Authors:
Meyyappan, M
Economou, DJ
Makabe, T
Citation: M. Meyyappan et al., Special issue on the modeling of collisional or near-collisionless low-temperature plasmas, IEEE PLAS S, 27(5), 1999, pp. 1223-1224
Authors:
Kurihara, M
Makabe, T
Citation: M. Kurihara et T. Makabe, Two-dimensional modeling of a micro-cell plasma in Xe driven by high frequency, IEEE PLAS S, 27(5), 1999, pp. 1372-1378
Authors:
Hirata, H
Tadokoro, M
Nakano, N
Petrovic, ZL
Makabe, T
Citation: H. Hirata et al., Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon, IEEE PLAS S, 27(1), 1999, pp. 50-51
Authors:
Shidoji, E
Nakano, N
Makabe, T
Citation: E. Shidoji et al., Numerical simulation of the discharge in d.c. magnetron sputtering, THIN SOL FI, 351(1-2), 1999, pp. 37-41